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Udupa, Ganesha, Ngoi, B K A, Goh, H C Freddy, Yusoff, M N (2004) Defect detection in unpolished Si wafers by digital shearography. Measurement Science and Technology, 15. 35-43 doi:10.1088/0957-0233/15/1/005

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Reference TypeJournal (article/letter/editorial)
TitleDefect detection in unpolished Si wafers by digital shearography
JournalMeasurement Science and Technology
AuthorsUdupa, GaneshaAuthor
Ngoi, B K AAuthor
Goh, H C FreddyAuthor
Yusoff, M NAuthor
Year2004 (January 1)Volume15
PublisherIOP Publishing
DOIdoi:10.1088/0957-0233/15/1/005Search in ResearchGate
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Mindat Ref. ID10193044Long-form Identifiermindat:1:5:10193044:6
GUID0
Full ReferenceUdupa, Ganesha, Ngoi, B K A, Goh, H C Freddy, Yusoff, M N (2004) Defect detection in unpolished Si wafers by digital shearography. Measurement Science and Technology, 15. 35-43 doi:10.1088/0957-0233/15/1/005
Plain TextUdupa, Ganesha, Ngoi, B K A, Goh, H C Freddy, Yusoff, M N (2004) Defect detection in unpolished Si wafers by digital shearography. Measurement Science and Technology, 15. 35-43 doi:10.1088/0957-0233/15/1/005
In(n.d.) Measurement Science and Technology Vol. 15. IOP Publishing

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