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Fleischmann, Claudia, Cuduvally, Ramya, Morris, Richard, Melkonyan, Davit, de Beeck, Jonathan Op, Makhotkin, Igor, van der Heide, Paul, Vandervorst, Wilfried (2019) Opportunities and Challenges in APT Metrology for Semiconductor Applications. Microscopy and Microanalysis, 25. 312-313 doi:10.1017/s1431927619002290

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Reference TypeJournal (article/letter/editorial)
TitleOpportunities and Challenges in APT Metrology for Semiconductor Applications
JournalMicroscopy and Microanalysis
AuthorsFleischmann, ClaudiaAuthor
Cuduvally, RamyaAuthor
Morris, RichardAuthor
Melkonyan, DavitAuthor
de Beeck, Jonathan OpAuthor
Makhotkin, IgorAuthor
van der Heide, PaulAuthor
Vandervorst, WilfriedAuthor
Year2019 (August)Volume25
PublisherCambridge University Press (CUP)
DOIdoi:10.1017/s1431927619002290Search in ResearchGate
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Mindat Ref. ID4885960Long-form Identifiermindat:1:5:4885960:6
GUID0
Full ReferenceFleischmann, Claudia, Cuduvally, Ramya, Morris, Richard, Melkonyan, Davit, de Beeck, Jonathan Op, Makhotkin, Igor, van der Heide, Paul, Vandervorst, Wilfried (2019) Opportunities and Challenges in APT Metrology for Semiconductor Applications. Microscopy and Microanalysis, 25. 312-313 doi:10.1017/s1431927619002290
Plain TextFleischmann, Claudia, Cuduvally, Ramya, Morris, Richard, Melkonyan, Davit, de Beeck, Jonathan Op, Makhotkin, Igor, van der Heide, Paul, Vandervorst, Wilfried (2019) Opportunities and Challenges in APT Metrology for Semiconductor Applications. Microscopy and Microanalysis, 25. 312-313 doi:10.1017/s1431927619002290
In(2019) Microscopy and Microanalysis Vol. 25. Cambridge University Press (CUP)

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Op de Beeck, Jonathan, Freysoldt, Christoph, Cuduvally, Ramya, Scheerder, Jeroen, Morris, Richard J. H., van der Heide, Paul, Vandervorst, Wilfried, Fleischmann, Claudia (2021) Evaporation Dynamics of Boron Dopants in Silicon. Microscopy and Microanalysis, 27. 418-420 doi:10.1017/s1431927621002014
Morris, Richard J.H., Cuduvally, Ramya, Melkonyan, Davit, Zhao, Ming, van der Heide, Paul, Vandervorst, Wilfried (2019) Atom probe of GaN/AlGaN heterostructures: The role of electric field, sample crystallography and laser excitation on quantification. Ultramicroscopy, 206. 112813pp. doi:10.1016/j.ultramic.2019.112813
van der Heide, Paul, Mathotkin, Igor, Vandervorst, Wilfried, Fleischmann, Claudia (2019) APT Tip Shape Modifications During Analysis, Its Implications, and the Potential to Measure Tip Shapes in Real Time via Soft-X-Ray Ptychography. Microscopy and Microanalysis, 25. 2504-2505 doi:10.1017/s1431927619013254
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Op de Beeck, Jonathan, Scheerder, Jeroen E., Geiser, Brian P., Bunton, Joseph H., Ulfig, Robert M., Larson, David J., van der Heide, Paul, Vandervorst, Wilfried, Fleischmann, Claudia (2022) The Prospect of Spatially Accurate Reconstructed Atom Probe Data Using Experimental Emitter Shapes. Microscopy and Microanalysis, 28 (4) 1141-1149 doi:10.1017/s143192762101357x
Morris, Richard J. H., Popovici, Mihaela, Meersschaut, Johan, Scheerder, Jeroen, Goux, Ludovic, Kar, Gouri, Fleischmann, Claudia, Vandervorst, Wilfried, van der Heide, Paul (2021) Stoichiometric analysis of superficial Ba doped Strontium Titanium Oxide layers using APT: the case of the missing Oxygen!. Microscopy and Microanalysis, 27. 2480-2481 doi:10.1017/s1431927621008849
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Fleischmann, Claudia, Krasnov, Vitaly V, Makhotkin, Igor A, Scheerder, Jeroen E, Tu, Yuan, van der Heide, Paul (2024) Experimental Tip Shape Imaging Routes to Assist Data Reconstruction in Atom Probe Tomography. Microscopy and Microanalysis, 30. doi:10.1093/mam/ozae044.031
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Morris, Richard J.H., Cuduvally, Ramya, Lin, Jhao-Rong, Zhao, Ming, Vandervorst, Wilfried, Thuvander, Mattias, Fleischmann, Claudia (2022) Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN. Ultramicroscopy, 241. 113592 doi:10.1016/j.ultramic.2022.113592
 
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