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Khabari, A., Urban, F.K. (2005) Partially ionized beam deposition of parylene. Journal of Non-Crystalline Solids, 351 (43) 3536-3541 doi:10.1016/j.jnoncrysol.2005.08.027

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Reference TypeJournal (article/letter/editorial)
TitlePartially ionized beam deposition of parylene
JournalJournal of Non-Crystalline Solids
AuthorsKhabari, A.Author
Urban, F.K.Author
Year2005 (November)Volume351
Issue43
PublisherElsevier BV
DOIdoi:10.1016/j.jnoncrysol.2005.08.027Search in ResearchGate
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Mindat Ref. ID643290Long-form Identifiermindat:1:5:643290:8
GUID0
Full ReferenceKhabari, A., Urban, F.K. (2005) Partially ionized beam deposition of parylene. Journal of Non-Crystalline Solids, 351 (43) 3536-3541 doi:10.1016/j.jnoncrysol.2005.08.027
Plain TextKhabari, A., Urban, F.K. (2005) Partially ionized beam deposition of parylene. Journal of Non-Crystalline Solids, 351 (43) 3536-3541 doi:10.1016/j.jnoncrysol.2005.08.027
In(2005, November) Journal of Non-Crystalline Solids Vol. 351 (43) Elsevier BV

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