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Lee, Sang Woon, Kwon, Oh Seong, Han, Jeong Hwan, Hwang, Cheol Seong (2008) Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications. Applied Physics Letters, 92 (22). 222903pp. doi:10.1063/1.2939102

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Reference TypeJournal (article/letter/editorial)
TitleEnhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications
JournalApplied Physics Letters
AuthorsLee, Sang WoonAuthor
Kwon, Oh SeongAuthor
Han, Jeong HwanAuthor
Hwang, Cheol SeongAuthor
Year2008 (June 2)Volume92
Issue22
PublisherAIP Publishing
DOIdoi:10.1063/1.2939102Search in ResearchGate
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Mindat Ref. ID8564342Long-form Identifiermindat:1:5:8564342:6
GUID0
Full ReferenceLee, Sang Woon, Kwon, Oh Seong, Han, Jeong Hwan, Hwang, Cheol Seong (2008) Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications. Applied Physics Letters, 92 (22). 222903pp. doi:10.1063/1.2939102
Plain TextLee, Sang Woon, Kwon, Oh Seong, Han, Jeong Hwan, Hwang, Cheol Seong (2008) Enhanced electrical properties of SrTiO3 thin films grown by atomic layer deposition at high temperature for dynamic random access memory applications. Applied Physics Letters, 92 (22). 222903pp. doi:10.1063/1.2939102
In(2008, June) Applied Physics Letters Vol. 92 (22) AIP Publishing

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Kwon, Oh Seong, Lee, Sang Woon, Han, Jeong Hwan, Hwang, Cheol Seong (2007) Atomic Layer Deposition and Electrical Properties of SrTiO[sub 3] Thin Films Grown Using Sr(C[sub 11]H[sub 19]O[sub 2])[sub 2], Ti(Oi-C[sub 3]H[sub 7])[sub 4], and H[sub 2]O. Journal of the Electrochemical Society, 154. doi:10.1149/1.2720763
Kim, Sang Hyeon, Lee, Woongkyu, An, Cheol Hyun, Kwon, Dae Seon, Kim, Dong-Gun, Cha, Soon Hyung, Cho, Seong Tak, Hwang, Cheol Seong (2018) Effect of Growth Temperature during the Atomic Layer Deposition of the SrTiO3Seed Layer on the Properties of RuO2/SrTiO3/Ru Capacitors for Dynamic Random Access Memory Applications. ACS Applied Materials & Interfaces, 10. 41544-41551 doi:10.1021/acsami.8b17366
Lee, Sang Woon, Han, Jeong Hwan, Kwon, Oh Seong, Hwang, Cheol Seong (2008) Influences of a Crystalline Seed Layer during Atomic Layer Deposition of SrTiO[sub 3] Thin Films Using Ti(O-iPr)[sub 2](thd)[sub 2], Sr(thd)[sub 2], and H[sub 2]O. Journal of the Electrochemical Society, 155. doi:10.1149/1.2976211
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Kim, Seong Keun, Lee, Sang Young, Seo, Minha, Choi, Gyu-Jin, Hwang, Cheol Seong (2007) Impact of O3 feeding time on TiO2 films grown by atomic layer deposition for memory capacitor applications. Journal of Applied Physics, 102 (2). 24109pp. doi:10.1063/1.2757008
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