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Tao, Y., Tillack, M. S., Sequoia, K. L., Burdt, R. A., Yuspeh, S., Najmabadi, F. (2008) Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse. Applied Physics Letters, 92 (25). 251501pp. doi:10.1063/1.2951595

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Reference TypeJournal (article/letter/editorial)
TitleEfficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse
JournalApplied Physics Letters
AuthorsTao, Y.Author
Tillack, M. S.Author
Sequoia, K. L.Author
Burdt, R. A.Author
Yuspeh, S.Author
Najmabadi, F.Author
Year2008 (June 23)Volume92
Issue25
PublisherAIP Publishing
DOIdoi:10.1063/1.2951595Search in ResearchGate
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Mindat Ref. ID8564996Long-form Identifiermindat:1:5:8564996:1
GUID0
Full ReferenceTao, Y., Tillack, M. S., Sequoia, K. L., Burdt, R. A., Yuspeh, S., Najmabadi, F. (2008) Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse. Applied Physics Letters, 92 (25). 251501pp. doi:10.1063/1.2951595
Plain TextTao, Y., Tillack, M. S., Sequoia, K. L., Burdt, R. A., Yuspeh, S., Najmabadi, F. (2008) Efficient 13.5nm extreme ultraviolet emission from Sn plasma irradiated by a long CO2 laser pulse. Applied Physics Letters, 92 (25). 251501pp. doi:10.1063/1.2951595
In(2008, June) Applied Physics Letters Vol. 92 (25) AIP Publishing

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Sequoia, K. L., Tao, Y., Yuspeh, S., Burdt, R., Tillack, M. S. (2008) Two dimensional expansion effects on angular distribution of 13.5nm in-band extreme ultraviolet emission from laser-produced Sn plasma. Applied Physics Letters, 92 (22). 221505pp. doi:10.1063/1.2938717
Yuspeh, S., Sequoia, K. L., Tao, Y., Tillack, M. S., Burdt, R. A., Najmabadi, F. (2010) Heating dynamics and extreme ultraviolet radiation emission of laser-produced Sn plasmas. Applied Physics Letters, 96 (26). 261501pp. doi:10.1063/1.3458696
Yuspeh, S., Sequoia, K. L., Tao, Y., Tillack, M. S., Burdt, R., Najmabadi, F. (2008) Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source. Applied Physics Letters, 93 (22). 221503pp. doi:10.1063/1.3036956
Yuspeh, S., Tao, Y., Burdt, R. A., Tillack, M. S., Ueno, Y., Najmabadi, F. (2011) Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source. Applied Physics Letters, 98 (20). 201501pp. doi:10.1063/1.3589359
Yuspeh, S., Ueno, Y., Tillack, M. S., Burdt, R., Tao, Y., Najmabadi, F. (2011) Cavity formation in a liquid Sn droplet driven by laser ablation pressure for an extreme ultraviolet light source target. Journal of Applied Physics, 109 (7). 76102pp. doi:10.1063/1.3572038
Tao, Y., Tillack, M. S., Yuseph, S., Burdt, R., Najmabadi, F. (2010) Nonclassical hydrodynamic behavior of Sn plasma irradiated with a long duration CO2 laser pulse. Applied Physics B, 99 (3). 397-400 doi:10.1007/s00340-010-3992-z
Burdt, Russell A., Yuspeh, Sam, Sequoia, Kevin L., Tao, Yezheng, Tillack, Mark S., Najmabadi, Farrokh (2009) Experimental scaling law for mass ablation rate from a Sn plasma generated by a 1064 nm laser. Journal of Applied Physics, 106 (3). 33310pp. doi:10.1063/1.3190537
Tao, Y., Tillack, M. S., Amin, N., Burdt, R. A., Yuspeh, S., Shaikh, N. M., Najmabadi, F. (2009) Flexible CO2 laser system for fundamental research related to an extreme ultraviolet lithography source. Review of Scientific Instruments, 80 (12). 123503pp. doi:10.1063/1.3270257
Tao, Y., Tillack, M. S., Harilal, S. S., Sequoia, K. L., Najmabadi, F. (2007) Investigation of the interaction of a laser pulse with a preformed Gaussian Sn plume for an extreme ultraviolet lithography source. Journal of Applied Physics, 101 (2). 23305pp. doi:10.1063/1.2426883
Burdt, Russell A., Ueno, Yoshifumi, Tao, Yezheng, Yuspeh, Sam, Tillack, Mark S., Najmabadi, Farrokh (2010) Recombination effects during expansion into vacuum in laser produced Sn plasma. Applied Physics Letters, 97 (4). 41502pp. doi:10.1063/1.3473817
Shaikh, Nek M., Tao, Y., Burdt, R. A., Yuspeh, S., Amin, N., Tillack, M. S. (2010) Spectroscopic analysis of temperature and density of Sn plasma produced by a CO2 laser. Journal of Applied Physics, 108 (8). 83109pp. doi:10.1063/1.3475369
 
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